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Proceedings Paper

Practical aspects of micromachined gas distribution systems for semiconductor processing
Author(s): Albert K. Henning; Brad A. Cozad; Elizabeth Lawrence; Errol B. Arkilic; James M. Harris
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Paper Abstract

Previously, we have reported the science and technology of micromachiend valves and orifices, and their integration to form high-performance mass-flow controllers (MFCs), and vacuum leak rate shut-off devices (SOVs). In this work, we expand the science and technology base of these devices, to include not only performance, but more practical aspects of their behavior. Specifically, for MFCs we have studied long-term drift, mean time tofail, particle generation, dry down after moisture contamination, gas replacement, effects of gravitational orientation, and sensitivity to inlet pressure and ambient temperature. For SOVs, we have studied mean time to fail, particle generation, dry down after moisture contamination, vacuum leak rate, and sensitivity to inlet pressure and ambient temperature.

Paper Details

Date Published: 18 August 2000
PDF: 12 pages
Proc. SPIE 4177, Microfluidic Devices and Systems III, (18 August 2000); doi: 10.1117/12.395668
Show Author Affiliations
Albert K. Henning, Redwood Microsystems, Inc. (United States)
Brad A. Cozad, Redwood Microsystems, Inc. (United States)
Elizabeth Lawrence, Redwood Microsystems, Inc. (United States)
Errol B. Arkilic, Redwood Microsystems, Inc. (United States)
James M. Harris, Redwood Microsystems, Inc. (United States)


Published in SPIE Proceedings Vol. 4177:
Microfluidic Devices and Systems III
Carlos H. Mastrangelo; Holger Becker, Editor(s)

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