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Proceedings Paper

UV-LIGA microfabrication and test of an ac-type micropump based on the magnetohydrodynamic (MHD) principle
Author(s): Khee-Hang Heng; Wanjun Wang; Michael C. Murphy; Kun Lian
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Paper Abstract

This paper reports on a research effort to design, microfabricate and test an AC-type magnetohydrodynamic (MHD) micropump using UV-LIGA microfabrication. The micropump is driven using the Lorentz force and can be used to deliver electrically conductive fluids. In the AC-type MHD micropump developed in our laboratory, a diffuser/nozzle is integrated with a MHD driving chamber. With a magnetic field supplied by an external permanent magnet, and an AC electrical current supplied across two copper side-walls, the distributed body force generated will produce a pressure difference on the fluid in the pumping chamber. The directional dependence of the flow resistance of the diffuser/nozzle allows for a net output flow in response to the oscillating pressure generated by the sinusoidal current. The major advantage of a MHD-based micropump is that it does not contain any moving parts. It may have potential applications in medicine delivery, and biological or biomedical studies. An AC-driven micropump may be used to improve on the performance obtained in tests of a DC-driven prototype micropump, that showed pumping performance was significantly degraded by bubble generation.

Paper Details

Date Published: 18 August 2000
PDF: 11 pages
Proc. SPIE 4177, Microfluidic Devices and Systems III, (18 August 2000); doi: 10.1117/12.395655
Show Author Affiliations
Khee-Hang Heng, Louisiana State Univ. (United States)
Wanjun Wang, Louisiana State Univ. (United States)
Michael C. Murphy, Louisiana State Univ. (United States)
Kun Lian, Louisiana State Univ. (United States)


Published in SPIE Proceedings Vol. 4177:
Microfluidic Devices and Systems III
Carlos H. Mastrangelo; Holger Becker, Editor(s)

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