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Proceedings Paper

Polymer microfluidics: the technology chain
Author(s): Holger Becker; Oliver Roetting; Wilfried Roepke; Ulf Heim
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Paper Abstract

In addition to existing microfabrication technologies for the manufacturing of glass or silicon-based microfluidic devices, the increasing demand for polymer based systems requires the establishment of equivalent technologies for the microstructuring of polymers. These technologies can be divided into two fields, the structuring of the polymer itself and the subsequent back-end processes. This article describes a complete technology chain covering these two technology fields.

Paper Details

Date Published: 18 August 2000
PDF: 6 pages
Proc. SPIE 4177, Microfluidic Devices and Systems III, (18 August 2000); doi: 10.1117/12.395647
Show Author Affiliations
Holger Becker, Jenoptik Mikrotechnik GmbH (Germany)
Oliver Roetting, Jenoptik Mikrotechnik GmbH (Germany)
Wilfried Roepke, Jenoptik Mikrotechnik GmbH (Germany)
Ulf Heim, Jenoptik Mikrotechnik GmbH (Germany)

Published in SPIE Proceedings Vol. 4177:
Microfluidic Devices and Systems III
Carlos H. Mastrangelo; Holger Becker, Editor(s)

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