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Proceedings Paper

Microresonator modified as magnetic sensor
Author(s): S. G. Lokhre; Prakash R. Apte; R. Raajeev; R. Lal
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Paper Abstract

Balanced doubly suspended structure has been used earlier for very precise high Q resonators. But here we have used the unbalanced half section which is sputter deposited with a magnetic film. The central axis acts like a torsion wire of about a micron width and thickness. The outer arm deflects downwards about the torsion axis when subjected to a magnetic field from beneath the sample. The deflection is measured by the reflected light presently under an optical microscope but can also be done by reflecting a laser beam as done in AFMs. The bending angle - versus - magnetic field is quite linear.

Paper Details

Date Published: 15 August 2000
PDF: 8 pages
Proc. SPIE 4176, Micromachined Devices and Components VI, (15 August 2000); doi: 10.1117/12.395645
Show Author Affiliations
S. G. Lokhre, Tata Institute of Fundamental Research (India)
Prakash R. Apte, Tata Institute of Fundamental Research (India)
R. Raajeev, Indian Institute of Technology (India)
R. Lal, Indian Institute of Technology (India)


Published in SPIE Proceedings Vol. 4176:
Micromachined Devices and Components VI
Eric Peeters; Oliver Paul, Editor(s)

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