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Proceedings Paper

Low-power micromachined structures for gas sensors with improved robustness
Author(s): Isabel Gracia; Andreas Goetz; Jose Antonio Plaza; Carles Cane; Patrice Roetsch; Harald Boettner; Klaus Seibert
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Paper Abstract

Current research on microstructures for semiconductor gas sensors is on development on low power and robust substrates. In this paper a microstructure based on the combination of micromachined silicon substrates and glass wafers is presented. This device shows high robustness and can reach high temperatures up to 700$DEGC with good power consumption. The optimisation of the design and the process fabrication is described.

Paper Details

Date Published: 15 August 2000
PDF: 11 pages
Proc. SPIE 4176, Micromachined Devices and Components VI, (15 August 2000); doi: 10.1117/12.395637
Show Author Affiliations
Isabel Gracia, Centro National de Microelectronica (Spain)
Andreas Goetz, Centro National de Microelectronica (Spain)
Jose Antonio Plaza, Centro National de Microelectronica (Spain)
Carles Cane, Centro National de Microelectronica (Spain)
Patrice Roetsch, Fraunhofer-Institut fuer Physikalische Messtechnik (Germany)
Harald Boettner, Fraunhofer-Institut fuer Physikalische Messtechnik (Germany)
Klaus Seibert, Fraunhofer-Institut fuer Physikalische Messtechnik (Germany)

Published in SPIE Proceedings Vol. 4176:
Micromachined Devices and Components VI
Eric Peeters; Oliver Paul, Editor(s)

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