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Proceedings Paper

From research to product: the CMOS MEMS case
Author(s): Henry Baltes
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Paper Abstract

Three promising methods of technology transfer from university to industry are illustrated by examples from the area of MEMS and microsensors. These methods are, in order of priority, the foundation of spin-off companies, the infiltration of companies by know-how carriers moving from university to industry, and joint research projects. Examples include micromachined CMOS infrared and chemical sensors and their packaging, the spin-off company SENSIRION and the Venture programs of ETH Zurich. Also mentioned are notorious transfer obstacles and how they may be overcome.

Paper Details

Date Published: 15 August 2000
PDF: 8 pages
Proc. SPIE 4176, Micromachined Devices and Components VI, (15 August 2000); doi: 10.1117/12.395624
Show Author Affiliations
Henry Baltes, ETH Zurich (Switzerland)


Published in SPIE Proceedings Vol. 4176:
Micromachined Devices and Components VI
Eric Peeters; Oliver Paul, Editor(s)

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