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Proceedings Paper

Automatic mesh adaptivity for finite element simulation of multilayer MEMS
Author(s): Jens Mueller; Jan G. Korvink
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Paper Abstract

We have produced an automatic method with which to simulate the structural response of prestressed multi-layer plate and beam micro- structures accurately and reliably. The method relives the microsystem designer of the burden of finite element mesh design by performing local mesh refinement. A coarse mesh is iteratively refined according to an error that is computed directly from the finite element solution. The refinement strategy covers locally prestressed regions, plate composition inhomogeneities, and singular loads, yielding an optimized mesh and a highly accurate computed deformation.

Paper Details

Date Published: 11 August 2000
PDF: 12 pages
Proc. SPIE 4175, Materials and Device Characterization in Micromachining III, (11 August 2000); doi: 10.1117/12.395615
Show Author Affiliations
Jens Mueller, Albert-Ludwigs-Univ. Freiburg (Germany)
Jan G. Korvink, Albert-Ludwigs-Univ. Freiburg (Germany)


Published in SPIE Proceedings Vol. 4175:
Materials and Device Characterization in Micromachining III
Yuli Vladimirsky; Philip J. Coane, Editor(s)

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