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Proceedings Paper

Nonlinear dynamic behavior of electrostatically actuated devices
Author(s): Yi-mang Chou; Weileun Fang
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Paper Abstract

The contribution of this paper is to improve the analytical model of the dynamic system for an electrostatically driven device. Therefore, the material properties such as Young's modulus will be determined more accurately; furthermore, the dynamic behavior of electrostatically actuated devices can be predicted more precisely.

Paper Details

Date Published: 11 August 2000
PDF: 7 pages
Proc. SPIE 4175, Materials and Device Characterization in Micromachining III, (11 August 2000); doi: 10.1117/12.395610
Show Author Affiliations
Yi-mang Chou, National Tsing Hua Univ. (Taiwan)
Weileun Fang, National Tsing Hua Univ. (Taiwan)


Published in SPIE Proceedings Vol. 4175:
Materials and Device Characterization in Micromachining III
Yuli Vladimirsky; Philip J. Coane, Editor(s)

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