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Proceedings Paper

RF MEMS microswitches design and characterization
Author(s): Xavier Lafontan; Christian Dufaza; Michel Robert; Guy Perez; Francis Pressecq
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Paper Abstract

This paper presents the work performed in MUMPs on RF MEMS micro-switch. Concepts, design and characterization of switches are studied. The study particularly focuses on the electrical resistance characterization and modelization. The switches developed uses two different principle: overflowed gold and hinged beam. The realized contacts exhibited high on resistance (~20(Omega) ) due to nanoscopics asperities of contacts and insulating interfacial films. Results of a typical contact cleaning method are also presented.

Paper Details

Date Published: 11 August 2000
PDF: 9 pages
Proc. SPIE 4175, Materials and Device Characterization in Micromachining III, (11 August 2000); doi: 10.1117/12.395602
Show Author Affiliations
Xavier Lafontan, Lab. d'Informatique de Robotique et de Microelectronique de Montpellier (France) and Ctr. (France)
Christian Dufaza, Lab. d'Informatique de Robotique et de Microelectronique de Montpellier (France)
Michel Robert, Lab. d'Informatique de Robotique et de Microelectronique de Montpellier (France)
Guy Perez, Ctr. National d'Etudes Spatiales (France)
Francis Pressecq, Ctr. National d'Etudes Spatiales (France)


Published in SPIE Proceedings Vol. 4175:
Materials and Device Characterization in Micromachining III
Yuli Vladimirsky; Philip J. Coane, Editor(s)

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