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Proceedings Paper

Coulomb image deformation in projection systems
Author(s): Boris G. Freinkman
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Paper Abstract

The paper looks into the applicability of two models of Coulomb interactions - space charge interaction and couple interaction - for image deformation calculations in the SCALPEL projection system. In contrast to [1-3], the paper takes into consideration thet electron beam structure which is determined by the image structure and focusing and diaphragming conditions. The calculations show that with the increasing electron current the space charge interaction becomes stronger than couple interactions. In a qualitative sense spherical aberrations caused by Coulomb interactions are the same in the both models. The inference is that a Coulomb decrease in resolution in this particular system is largely due to space charge interactions. The calculations of the central point spread show that the resolution can be increased several times by correction choosing the location of the image plane. With the beam enery of 100 KV and current of 50 (mu) A the highest resolution is 25 nm.

Paper Details

Date Published: 2 August 2000
PDF: 8 pages
Proc. SPIE 4187, Fourth All-Russian Seminar on Problems of Theoretical and Applied Electron Optics, (2 August 2000); doi: 10.1117/12.394159
Show Author Affiliations
Boris G. Freinkman, Institute for Microelectronics and Pure Materials (Russia)


Published in SPIE Proceedings Vol. 4187:
Fourth All-Russian Seminar on Problems of Theoretical and Applied Electron Optics

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