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Proceedings Paper

Efficiency of secondary-electron detectors
Author(s): Boris N. Vasichev; A. A. Melnikov; O. D. Potapkin
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Paper Abstract

The collection coefficient for secondary electrons is calculated for a two-detector system. The coefficient is an important parameter that determines the accuracy of line-width measurements in electron beam plants. Calculations of the chamber electrostatic field for various boundary conditions are presented. Trajectories of secondary electrons are found.

Paper Details

Date Published: 2 August 2000
PDF: 6 pages
Proc. SPIE 4187, Fourth All-Russian Seminar on Problems of Theoretical and Applied Electron Optics, (2 August 2000); doi: 10.1117/12.394158
Show Author Affiliations
Boris N. Vasichev, Moscow State Institute of Electronics and Mathematics (Russia)
A. A. Melnikov, Moscow State Institute of Radioengineering, Electronics, and Automation (Russia)
O. D. Potapkin, Research Institute of Electron and Ion Optics (Russia)


Published in SPIE Proceedings Vol. 4187:
Fourth All-Russian Seminar on Problems of Theoretical and Applied Electron Optics

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