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Proceedings Paper

Electron-optical properties of electrostatic immersion objective
Author(s): O. D. Potapkin
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Paper Abstract

Long focus eletrostatic objective of simplest geometry with plane cathode has been investigated. Main feature of the immersion objective is telescopic mode and its linear magnification is almost constant in wide range of electrode potential changing. The spherical and chromatical aberration dependence on electrodes potential was studing. The results can be useful for optimization of geometrical size of low- voltage immersion objectives and for quick evaluation of electron optical properties of immersion lens.

Paper Details

Date Published: 2 August 2000
PDF: 4 pages
Proc. SPIE 4187, Fourth All-Russian Seminar on Problems of Theoretical and Applied Electron Optics, (2 August 2000); doi: 10.1117/12.394157
Show Author Affiliations
O. D. Potapkin, Research Institute of Electron and Ion Optics (Russia)


Published in SPIE Proceedings Vol. 4187:
Fourth All-Russian Seminar on Problems of Theoretical and Applied Electron Optics
Anatoly M. Filachev; Inna S. Gaidoukova, Editor(s)

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