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Proceedings Paper

Fifth-order aperture aberration of electrostatic quadrupole lens systems
Author(s): Lubov A. Baranova
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Paper Abstract

The fifth order aperture aberration is investigated in three types of quadrupole lens systems: the conventional regular antisymmetric quadruplet, the quadruplet made of combined quadrupole-octupole systems in which the third order aperture aberration is eliminated, and the mid- acceleration quadruplet produced by applying an accelerating voltage to the two middle lenses that results in the essential reduction of the aperture aberration. It is shown that for small initial trajectory slopes (less than 0.02) the quadrupole-octupole system provides smaller image blurring. For higher trajectory slopes when the fifth order aperture aberration becomes dominant the smallest beam spot is formed by the mid-acceleration quadruplet.

Paper Details

Date Published: 2 August 2000
PDF: 10 pages
Proc. SPIE 4187, Fourth All-Russian Seminar on Problems of Theoretical and Applied Electron Optics, (2 August 2000); doi: 10.1117/12.394155
Show Author Affiliations
Lubov A. Baranova, A.F. Ioffe Physico-Technical Institute (Russia)


Published in SPIE Proceedings Vol. 4187:
Fourth All-Russian Seminar on Problems of Theoretical and Applied Electron Optics
Anatoly M. Filachev; Inna S. Gaidoukova, Editor(s)

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