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Proceedings Paper

Hot electron emission from insulators under electron-beam processing
Author(s): Anatoly M. Filachev; Boris I. Fouks; Dmitrii E. Greenfield
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Paper Abstract

The experimental study of charge relaxation while electron beam processing of dielectrics has shown that under irradiation with an intensive and concentrated electron beam some dielectrics reveal strange behavior. The electron emission from their surface much exceeds the value expected frmo the conventional theory of the secondary electron emission. Moreover, the time dependence of the emission is quite different. The measured current changes rapidly with time and, under some circumstances, oscillates while the secondary emission is always proportional to the electron beam's current. The target of the present paper is to construct the physical model of this effect employing the theory of hot electrons.

Paper Details

Date Published: 2 August 2000
PDF: 8 pages
Proc. SPIE 4187, Fourth All-Russian Seminar on Problems of Theoretical and Applied Electron Optics, (2 August 2000); doi: 10.1117/12.394148
Show Author Affiliations
Anatoly M. Filachev, Scientific and Research Institute of Electron and Ion Optics (Russia)
Boris I. Fouks, Institute of Radioengineering and Electronics (Russia)
Dmitrii E. Greenfield, Scientific and Research Institute of Electron and Ion Optics (Russia)


Published in SPIE Proceedings Vol. 4187:
Fourth All-Russian Seminar on Problems of Theoretical and Applied Electron Optics
Anatoly M. Filachev; Inna S. Gaidoukova, Editor(s)

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