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Proceedings Paper

Some aspect of MEMS technology
Author(s): Evgenij N. Pyatishev; Mihail S. Lurie; Irina V. Popova
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Paper Abstract

The paper considers differences between basic operations of the microelectromechanical systems (MEMS) and microelectronic manufacturing processes. The design and fabrication of the vibration microgyroscope are discussed to exemplify the inadequacy of standard microelectronic techniques for needs of MEM technologies and necessity of developing new basic technologies.

Paper Details

Date Published: 2 August 2000
PDF: 4 pages
Proc. SPIE 4187, Fourth All-Russian Seminar on Problems of Theoretical and Applied Electron Optics, (2 August 2000); doi: 10.1117/12.394145
Show Author Affiliations
Evgenij N. Pyatishev, St. Petersburg State Technical Univ. (Russia)
Mihail S. Lurie, St. Petersburg State Technical Univ. (Russia)
Irina V. Popova, Gyrooptics Co. (Russia)


Published in SPIE Proceedings Vol. 4187:
Fourth All-Russian Seminar on Problems of Theoretical and Applied Electron Optics
Anatoly M. Filachev; Inna S. Gaidoukova, Editor(s)

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