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Proceedings Paper

Miniature mass spectrometer for chemical and biological sensing
Author(s): Steve Taylor; Balasingam Srigengan; J. R. Gibson; Dick Tindall; Richard R. A. Syms; Tom Tate; Munir M. Ahmad
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Paper Abstract

An experimental study has been carried out using a Miniature Quadrupole Mass Spectrometer (MicroQuad) for gas analysis. Conventional quadrupole rods have been replaced with a micromachined mass filter made from silicon with Au metallized specially drawn glass fibers of length 30 mm and diameter 0.5 mm. A standard hot filament ion source and both Faraday detection and a channel electron multiplier have been used. The effect of ion focus voltage has also been modeled by SIMION simulation. Conventional electronics were adapted to run at 6 to 8 MHz and mass spectra in the range 0 - 50 a.m.u. The results indicate a good valley separation between O, OH, H2O and Ar2+ and a best resolution at 10% peak height of 0.9 a.m.u. at mass 40 with the multiplier. Application of a static magnetic field transversely to the body of the mass filter is shown to improve resolution howbeit at the expense of ion transmission through the filter.

Paper Details

Date Published: 28 July 2000
PDF: 7 pages
Proc. SPIE 4036, Chemical and Biological Sensing, (28 July 2000); doi: 10.1117/12.394074
Show Author Affiliations
Steve Taylor, Liverpool Univ. (United Kingdom)
Balasingam Srigengan, Liverpool Univ. (United Kingdom)
J. R. Gibson, Liverpool Univ. (United Kingdom)
Dick Tindall, TinT Design (United Kingdom)
Richard R. A. Syms, Imperial College of Science, Technology and Medicine (United Kingdom)
Tom Tate, Imperial College of Science, Technology and Medicine (United Kingdom)
Munir M. Ahmad, Imperial College of Science, Technology and Medicine (United Kingdom)


Published in SPIE Proceedings Vol. 4036:
Chemical and Biological Sensing
Patrick J. Gardner, Editor(s)

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