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Proceedings Paper

New multichamber evaporator for organic devices
Author(s): Qiulai Wang; Weiling Guo; Michael C. Y. Chan; ShiChuang Liu; E. Herbert Li; Charles C. Surya
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Paper Abstract

A new four vacuum chamber evaporator for organic devices was proposed and specially designed. The chamber one is for ITO/glass pretreatment, it's have ozone treatment and plasma treatment. The chamber two is used for organic thin film evaporating. There has six sources for organic material, and three power sources can work at the same time, there is a mask storage chamber in the organic evaporation chamber, so for some material research, you can get three kind of doping density of thickness OLED at the same fabrication. The chamber three is a vacuum glove box. It's used for package. The chamber four is used for cathode evaporating, it can evaporates Mg, Ag, LfF, Ca, Al, Au.

Paper Details

Date Published: 11 July 2000
PDF: 3 pages
Proc. SPIE 4078, Optoelectronic Materials and Devices II, (11 July 2000); doi: 10.1117/12.392153
Show Author Affiliations
Qiulai Wang, ShenYang Institute of UHV Technology and Applications (China)
Weiling Guo, Univ. of Hong Kong (Hong Kong)
Michael C. Y. Chan, Hong Kong Polytechnic Univ (Hong Kong)
ShiChuang Liu, ShenYang Institute of UHV Technology and Applications (China)
E. Herbert Li, Univ. of Hong Kong (United States)
Charles C. Surya, Hong Kong Polytechnic Univ. (Hong Kong)


Published in SPIE Proceedings Vol. 4078:
Optoelectronic Materials and Devices II
Yan-Kuin Su; Pallab Bhattacharya, Editor(s)

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