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Proceedings Paper

Semiconductor photonic integration: a regrowth free approach
Author(s): John H. Marsh
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Paper Abstract

A robust impurity free quantum well intermixing process has been developed that allows complex photonic integrated circuits to be fabricated. Characteristics of the process are discussed and its attributes summarised. The use of the process in three widely differing fabricating applications is described: high-power high-brightness AlGaInP semiconductor laser diodes, nonlinear GaAs/AlGaAs waveguide devices and InGaAsP/InP crosspoint switches.

Paper Details

Date Published: 11 July 2000
PDF: 12 pages
Proc. SPIE 4078, Optoelectronic Materials and Devices II, (11 July 2000); doi: 10.1117/12.392145
Show Author Affiliations
John H. Marsh, Univ. of Glasgow (United Kingdom)


Published in SPIE Proceedings Vol. 4078:
Optoelectronic Materials and Devices II
Yan-Kuin Su; Pallab Bhattacharya, Editor(s)

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