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Proceedings Paper

Low-dielectric-constant photoresists for insulation on TFT array
Author(s): Rong-Jer Lee; YouCheng Wu; ShihLieh Chen; Song-Shiang Lin; HsienWen Chien
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Paper Abstract

This paper describes a low dielectric constant, high resolution and high brightness single layer positive photoresist on TFT array. A currently used positive photoresist comprising of low dielectric constant materials and a chemically amplified resis system is designed for the insulation layer on TFT array to enlarge pixel aperture ration of TFT-LCD.

Paper Details

Date Published: 11 July 2000
PDF: 6 pages
Proc. SPIE 4078, Optoelectronic Materials and Devices II, (11 July 2000); doi: 10.1117/12.392115
Show Author Affiliations
Rong-Jer Lee, Industrial Technology Research Institute (Taiwan)
YouCheng Wu, Industrial Technology Research Institute (Taiwan)
ShihLieh Chen, Industrial Technology Research Institute (Taiwan)
Song-Shiang Lin, Industrial Technology Research Institute (Taiwan)
HsienWen Chien, Industrial Technology Research Institute (Taiwan)

Published in SPIE Proceedings Vol. 4078:
Optoelectronic Materials and Devices II
Yan-Kuin Su; Pallab Bhattacharya, Editor(s)

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