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Proceedings Paper

Foundry maskshop operation strategy and management
Author(s): Chue-San Yoo; John C.H. Lin; Jia-Jing Wang
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Paper Abstract

To meet the ever-increasing demands from wafer fabs, a foundry maskshop is required to have an effective operation and management strategy so that its potential strengths are not diluted as it grows. Wafer foundry capacity increase could mean both increases in output capacity and the number of operation sites. In this paper, we will discuss the potential strengths of a foundry maskshop, strategy and management of it so as to embrace the challenges of the ever increasing demands from wafer foundry fabs in terms of technology, capacity and cycle time.

Paper Details

Date Published: 19 July 2000
PDF: 6 pages
Proc. SPIE 4066, Photomask and Next-Generation Lithography Mask Technology VII, (19 July 2000); doi: 10.1117/12.392084
Show Author Affiliations
Chue-San Yoo, Taiwan Semiconductor Manufacturing Co., Ltd. (Taiwan)
John C.H. Lin, Taiwan Semiconductor Manufacturing Co., Ltd. (Taiwan)
Jia-Jing Wang, Taiwan Semiconductor Manufacturing Co., Ltd. (Taiwan)


Published in SPIE Proceedings Vol. 4066:
Photomask and Next-Generation Lithography Mask Technology VII
Hiroaki Morimoto, Editor(s)

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