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Proceedings Paper

Geometric correction of SEM images
Author(s): Jay P. Kapur; David P. Casasent
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Paper Abstract

Abstract not available.

Paper Details

Date Published: 17 July 2000
PDF: 12 pages
Proc. SPIE 4044, Hybrid Image and Signal Processing VII, (17 July 2000); doi: 10.1117/12.391928
Show Author Affiliations
Jay P. Kapur, Carnegie Mellon Univ. (United States)
David P. Casasent, Carnegie Mellon Univ. (United States)


Published in SPIE Proceedings Vol. 4044:
Hybrid Image and Signal Processing VII
David P. Casasent; Andrew G. Tescher, Editor(s)

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