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Proceedings Paper

Antenna-coupled microbolometers for passive millimeter-wave imaging
Author(s): Arttu R.M. Luukanen; Seppo Vaijaervi; Heikki Sipila
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Paper Abstract

Antenna-coupled microbolometers have demonstrated an adequate sensitivity for mm-wave detection. The detector operating principle is based on a lithographic antenna, which is terminated by a matched resistive bolometer. The incident RF power is dissipated in the bolometer element, and the resulting temperature rise is measured with low noise electronics. In this paper, we summarize the recent development in microbolometer technology for millimeter-wave imaging. The aim is to develop a 20 element linear array of detectors with an optical NEP < 10 (DOT) 10-12/(root)Hz at room temperature. In order to reach good performance, excellent thermal isolation of the bolometer element is required. This can be achieved either by silicon micromachining techniques or by the use of low thermal conductivity substrate materials. For good optical performance, a careful design of the coupling structures is required. The lithographic antenna candidates best suited for array applications is discussed. Also the requirements for integrated quasioptical elements are presented.

Paper Details

Date Published: 20 July 2000
PDF: 8 pages
Proc. SPIE 4032, Passive Millimeter-Wave Imaging Technology IV, (20 July 2000); doi: 10.1117/12.391823
Show Author Affiliations
Arttu R.M. Luukanen, Metorex International Oy (Finland)
Seppo Vaijaervi, Metorex International Oy (Finland)
Heikki Sipila, Metorex International Oy (Finland)


Published in SPIE Proceedings Vol. 4032:
Passive Millimeter-Wave Imaging Technology IV
Roger M. Smith; Roger Appleby, Editor(s)

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