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Proceedings Paper

Miniature VO2-based bolometric detectors for high-resolution uncooled FPAs
Author(s): Hubert Jerominek; Timothy D. Pope; Christine Alain; Rose Zhang; Francis Picard; Mario Lehoux; Felix Cayer; Simon Savard; Carl Larouche; Carol Grenier
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Paper Abstract

Prototypes of VO2-based bolometric detectors with lateral dimensions of 25 X 25, 30 X 30, 35 X 35, 40 X 40 and finally 50 X 50 micrometers2 and fill factors approaching 90% are presented. These detectors are grouped in hardwired linear arrays as large as 512 X 1 pixels. Under DC biasing, the fabricated detectors, even the smallest ones, exhibit responsivities from 48,000 to 120,000 VW-1, detectivities in the range of 1.5 X 108 cm Hz1/2W-1 and response times in the range of 5 ms. These new bolometric detector structures contain hidden-legs placed completely underneath the bolometer platform. Results of simulations of the mechanical, optical and electrical properties of these new detector structures are presented. A complete detector fabrication process flow is described.

Paper Details

Date Published: 17 July 2000
PDF: 10 pages
Proc. SPIE 4028, Infrared Detectors and Focal Plane Arrays VI, (17 July 2000); doi: 10.1117/12.391766
Show Author Affiliations
Hubert Jerominek, National Optics Institute (Canada)
Timothy D. Pope, National Optics Institute (Canada)
Christine Alain, National Optics Institute (Canada)
Rose Zhang, National Optics Institute (United States)
Francis Picard, National Optics Institute (Canada)
Mario Lehoux, National Optics Institute (Canada)
Felix Cayer, National Optics Institute (Canada)
Simon Savard, National Optics Institute (Canada)
Carl Larouche, National Optics Institute (Canada)
Carol Grenier, National Optics Institute (Canada)

Published in SPIE Proceedings Vol. 4028:
Infrared Detectors and Focal Plane Arrays VI
Eustace L. Dereniak; Robert E. Sampson, Editor(s)

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