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Proceedings Paper

Linear arrays of fast uncooled poly-SiGe microbolometers for IR detection
Author(s): Piet De Moor; Joachim John; Sherif Sedky; Chris A. Van Hoof
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Paper Abstract

Polycrystalline Silicon Germanium is a useful material for CMOS compatible uncooled IR bolometer manufacturing due to its excellent material characteristics such as low stress and high TCR. However, for IR imaging applications, fast and yet sensitive detectors are required. We managed to combine these two contrasting characteristics by fabricating very thin devices. This was only possible thanks to a new release technique based on vapor HF at elevated wafer temperatures, and to structural stiffness enhancement of the devices by applying U-profiles. Furthermore, a performant and low cost on-chip vacuum package has been developed. The combination of these features is applied in linear arrays of bolometers which are read-out by a dedicated noise reduction circuit using an MCM board.

Paper Details

Date Published: 17 July 2000
PDF: 8 pages
Proc. SPIE 4028, Infrared Detectors and Focal Plane Arrays VI, (17 July 2000); doi: 10.1117/12.391754
Show Author Affiliations
Piet De Moor, IMEC (Belgium)
Joachim John, IMEC (Belgium)
Sherif Sedky, IMEC (Egypt)
Chris A. Van Hoof, IMEC (Belgium)


Published in SPIE Proceedings Vol. 4028:
Infrared Detectors and Focal Plane Arrays VI
Eustace L. Dereniak; Robert E. Sampson, Editor(s)

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