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Proceedings Paper

Micro-optomechanical infrared receiver with optical readout: MIRROR
Author(s): Paul R. Norton; M. Mao; Thomas M. Perazzo; Yang Zhao; O. Kwon; Arunava Majumdar; John B. Varesi
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Paper Abstract

An uncooled infrared detector having an optical readout is described. Infrared heat is sensed with bimaterial cantilevers which bend in response to temperature changes. One side of the bimaterial cantilever is an optical reflector. Visible light reflecting off the bent cantilever is detected with a CCD camera to provide the sensor output. We describe this device as a micro-optomechanical infrared receiver with optical readout -- MIRROR. Devices based upon this principle have successfully imaged infrared. Changes to the system are in progress to improve sensitivity.

Paper Details

Date Published: 17 July 2000
PDF: 7 pages
Proc. SPIE 4028, Infrared Detectors and Focal Plane Arrays VI, (17 July 2000); doi: 10.1117/12.391720
Show Author Affiliations
Paul R. Norton, IR Vision (United States)
M. Mao, Univ. of California/Berkeley (United States)
Thomas M. Perazzo, Univ. of California/Berkeley (United States)
Yang Zhao, Univ. of California/Berkeley (United States)
O. Kwon, Univ. of California/Berkeley (United States)
Arunava Majumdar, Univ. of California, Berkeley (United States)
John B. Varesi, Raytheon Co. (United States)


Published in SPIE Proceedings Vol. 4028:
Infrared Detectors and Focal Plane Arrays VI
Eustace L. Dereniak; Robert E. Sampson, Editor(s)

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