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Proceedings Paper

Ambient temperature IR focal plane arrays
Author(s): Neal R. Butler
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Paper Abstract

The advent of modern photolithography and micromachining techniques has led to the development of many kinds of infrared sensitive focal plane arrays. This paper outlines the history of the development of modern uncooled thermal detector arrays, considerations for reading out those arrays, scaling laws for array design parameters, and ways to improve sensitivity and dynamic range. Future arrays will have smaller pitch (15 micrometer), higher sensitivity (10 - 20 mK, F/1), wider dynamic range (> 100 degrees Celsius, 10,000:1), and better resolution (1280 X 1024). These improvements will come about with better photolithographic resolution, thinner structures, and reduced noise.

Paper Details

Date Published: 17 July 2000
PDF: 8 pages
Proc. SPIE 4028, Infrared Detectors and Focal Plane Arrays VI, (17 July 2000); doi: 10.1117/12.391718
Show Author Affiliations
Neal R. Butler, Sanders, A Lockheed Martin Co. (United States)

Published in SPIE Proceedings Vol. 4028:
Infrared Detectors and Focal Plane Arrays VI
Eustace L. Dereniak; Robert E. Sampson, Editor(s)

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