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Proceedings Paper

Neural network modeling of growth processes
Author(s): S. Venkateswaran; M. M. Rai; T. R. Govindan; Meyya Meyyappan
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Paper Abstract

Process control based on first-principles models is possible if the information from the reactor simulations can be represented in a compact model. This is necessary since on- demand reactor simulation in real time for control purposes is not currently realistic. We have developed a neural network based model for applications in process control and process design.

Paper Details

Date Published: 14 July 2000
PDF: 8 pages
Proc. SPIE 3944, Physics and Simulation of Optoelectronic Devices VIII, (14 July 2000); doi: 10.1117/12.391447
Show Author Affiliations
S. Venkateswaran, NASA Ames Research Ctr. (United States)
M. M. Rai, NASA Ames Research Ctr. (United States)
T. R. Govindan, NASA Ames Research Ctr. (United States)
Meyya Meyyappan, NASA Ames Research Ctr. (United States)


Published in SPIE Proceedings Vol. 3944:
Physics and Simulation of Optoelectronic Devices VIII
Rolf H. Binder; Peter Blood; Marek Osinski, Editor(s)

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