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Proceedings Paper

EUV holographic aerial image recording
Author(s): Sang Hun Lee; Patrick P. Naulleau; Kenneth A. Goldberg; Chang Hyun Cho; Jeffrey Bokor
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Paper Abstract

One-hundred-nm-resolution holographic aerial image monitoring based on lensless Fourier-transform holography at EUV wavelengths using a synchrotron-based source is described. This method can be used to monitor the coherent imaging performance of EUV lithographic optical systems. The system has been implemented in the EUV phase-shifting point diffraction interferometer (PS/PDI) at Lawrence Berkeley National Lab. Here we introduce the idea of the holographic aerial image recording technique and present imaging performance characterization results of an EUV 10x-reduction Schwarzschild objective.

Paper Details

Date Published: 21 July 2000
PDF: 6 pages
Proc. SPIE 3997, Emerging Lithographic Technologies IV, (21 July 2000); doi: 10.1117/12.390125
Show Author Affiliations
Sang Hun Lee, Lawrence Berkeley National Lab. and Univ. of California/Berkeley (United States)
Patrick P. Naulleau, Lawrence Berkeley National Lab. (United States)
Kenneth A. Goldberg, Lawrence Berkeley National Lab. (United States)
Chang Hyun Cho, Lawrence Berkeley National Lab. and Univ. of California/Berkeley (United States)
Jeffrey Bokor, Lawrence Berkeley National Lab. and Univ. of California/Berkeley (United States)


Published in SPIE Proceedings Vol. 3997:
Emerging Lithographic Technologies IV
Elizabeth A. Dobisz, Editor(s)

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