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Proceedings Paper

Diagnostic technique of gas jet for debris-free laser plasma EUV source
Author(s): Sergei V. Bobashev; Rene de Bruijn; Tatyana G. Kopytova; Yurii A. Kurakin; Alexander A. Schmidt; Zinaida A. Stepanova; Gennadii K. Tumakaev
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Paper Abstract

Gas target parameters are determined both experimentally and by numerical simulation. A new experimental setup was built to produce a supersonic gas jet to implant schlieren photography to investigate the gas jet. A numerical study was also performed to estimate parameters of the jets and effects of nozzle shapes, pressure ratio as well as working and ambient gas parameters. Effect of homogeneous nucleation and micro- droplets formation in the expanding jet was taking into account. The developed approach demonstrates good efficiency, flexibility and accuracy. It enables one to consider nozzle starting processes with shocked flows characterized by complicated structure and phase transfer processes. Jet structure and parameters (density, velocity and temperature fields) were determined as well as fraction of condensed matter and micro-drop parameters.

Paper Details

Date Published: 21 July 2000
PDF: 7 pages
Proc. SPIE 3997, Emerging Lithographic Technologies IV, (21 July 2000); doi: 10.1117/12.390118
Show Author Affiliations
Sergei V. Bobashev, A.F. Ioffe Physico-Technical Institute (Russia)
Rene de Bruijn, FOM-Institute for Plasma Physics Rijnhuizen (Netherlands)
Tatyana G. Kopytova, A.F. Ioffe Physico-Technical Institute (Russia)
Yurii A. Kurakin, A.F. Ioffe Physico-Technical Institute (Russia)
Alexander A. Schmidt, A.F. Ioffe Physico-Technical Institute (Russia)
Zinaida A. Stepanova, A.F. Ioffe Physico-Technical Institute (Russia)
Gennadii K. Tumakaev, A.F. Ioffe Physico-Technical Institute (Russia)

Published in SPIE Proceedings Vol. 3997:
Emerging Lithographic Technologies IV
Elizabeth A. Dobisz, Editor(s)

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