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Proceedings Paper

Maskless 3D micromachining with focused ion beam of high-resolution diffractive optics
Author(s): Chantal G. Khan Malek; Frank T. Hartley; Jayant Neogi
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Paper Abstract

We discuss here the capability and details of direct manufacture of various high-resolution diffractive optics using focused ion beam (FIB) micromachining. In preliminary demonstrations illustrating the capability of the technique, zone plates and gratings were milled in gold using a reactive atmosphere in an automated FIB system operating at 30 keV with a Gallium liquid metal ion source equipped with an iodine beam gas injection system (GIS). Gratings with 20 nm line width and zone plates with 32 nm outer ring were milled directly through 3.5 micrometer and 800 nm of gold respectively.

Paper Details

Date Published: 21 July 2000
PDF: 7 pages
Proc. SPIE 3997, Emerging Lithographic Technologies IV, (21 July 2000); doi: 10.1117/12.390040
Show Author Affiliations
Chantal G. Khan Malek, Louisiana State Univ., CNRS, and LURE (France)
Frank T. Hartley, Jet Propulsion Lab. (United States)
Jayant Neogi, Norsam Technologies, Inc. (United States)

Published in SPIE Proceedings Vol. 3997:
Emerging Lithographic Technologies IV
Elizabeth A. Dobisz, Editor(s)

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