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Proceedings Paper

Direct creation of microstuctures in fluorine-containing polymers
Author(s): Vladimir Nazmov; Valery F. Pindyurin; Lubov A. Mezentseva; B. V. Mchedlishvili; Alexander I. Vilensky; V. V. Shirkova; V. E. Istomin
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Paper Abstract

Ablation of fluorine-containing polymers is studied under the influence of ionizing roentgen radiation. Physical-chemical properties of the polymers FEP and PVDF irradiated with synchrotron radiation were investigated. When film temperature increases because of the irradiation, intense removing of the polymer proceeds with high selectivity. Polymer membranes with regular disposition of through pores were created in the absorbing layer of submicron size in the process of irradiation of fluorine-containing films through a mask with regular holes.

Paper Details

Date Published: 21 July 2000
PDF: 3 pages
Proc. SPIE 3997, Emerging Lithographic Technologies IV, (21 July 2000); doi: 10.1117/12.390037
Show Author Affiliations
Vladimir Nazmov, Budker Institute of Nuclear Physics (Germany)
Valery F. Pindyurin, Budker Institute of Nuclear Physics (Russia)
Lubov A. Mezentseva, Budker Institute of Nuclear Physics (Russia)
B. V. Mchedlishvili, Crystallography Institute (Russia)
Alexander I. Vilensky, Crystallography Institute (Israel)
V. V. Shirkova, Joint Institute for Nuclear Research (Russia)
V. E. Istomin, United Institute of Geology, Geophysics and Mineralogy (Russia)

Published in SPIE Proceedings Vol. 3997:
Emerging Lithographic Technologies IV
Elizabeth A. Dobisz, Editor(s)

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