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Proceedings Paper

Characteristics of single-pulse excimer laser beam profile on the low-temperature poly-Si TFTs
Author(s): ChuJung Shih; LiMing Wang; ShihChang Chang; I-Min Lu; I-Wei Wu
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Paper Abstract

In this study, the effects of laser beam profiles were investigated on the crystallization of poly-Si films. `One Pulse' laser crystallized poly-Si was analyzed by SEM and alpha-step to distinguish the effects of non-uniform laser beam profiles. Surface smoothness of poly-Si films with various laser-overlapping ratios was also measured to investigate the effects of laser beam profiles. Then the relationship of TFT characteristics and laser overlapping ratios will be discussed.

Paper Details

Date Published: 30 June 2000
PDF: 4 pages
Proc. SPIE 4079, Display Technologies III, (30 June 2000); doi: 10.1117/12.389423
Show Author Affiliations
ChuJung Shih, Industrial Technology Research Institute (Taiwan)
LiMing Wang, Industrial Technology Research Institute (Taiwan)
ShihChang Chang, Industrial Technology Research Institute (Taiwan)
I-Min Lu, Industrial Technology Research Institute (Taiwan)
I-Wei Wu, Industrial Technology Research Institute (Taiwan)

Published in SPIE Proceedings Vol. 4079:
Display Technologies III
I-Wei Wu; Heiju Uchiike, Editor(s)

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