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Proceedings Paper

Study of 5-mask TFT array process with low-cost high-yield high-performance characteristics
Author(s): Jr-Hong Chen; Ting-Hui Huang; I-Min Lu; Pi-Fu Chen; Dou-I Chen
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Paper Abstract

Three types of 5-mask TFT array process have been compared and analyzed their characteristics including TFT performance, process window, etc. Results showing here indicate that a 5-mask TFT manufacturing process can be optimized with low cost, high production yield and high performance. These properties let the reduced mask TFT array process reveal a much higher potential in mass production.

Paper Details

Date Published: 30 June 2000
PDF: 7 pages
Proc. SPIE 4079, Display Technologies III, (30 June 2000); doi: 10.1117/12.389408
Show Author Affiliations
Jr-Hong Chen, Industrial Technology Research Institute (Taiwan)
Ting-Hui Huang, Quanta Display Inc. (Taiwan)
I-Min Lu, Industrial Technology Research Institute (Taiwan)
Pi-Fu Chen, Industrial Technology Research Institute (Taiwan)
Dou-I Chen, Industrial Technology Research Institute (Taiwan)


Published in SPIE Proceedings Vol. 4079:
Display Technologies III
I-Wei Wu; Heiju Uchiike, Editor(s)

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