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Proceedings Paper

Behavior of fused silica materials for microlithography irradiated at 193 nm with low-fluence ArF radiation for tens of billions of pulses
Author(s): Richard G. Morton; Richard L. Sandstrom; Gerry M. Blumenstock; Zsolt Bor; Chris K. Van Peski
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Paper Abstract

Fused silica samples from seven different suppliers were exposed at low fluence; nominally 0.1 mJ/cm2, for tens of billions of pulses. These materials are used in the manufacture of projection and other optics needed for DUV microlithography. The fluence level chosen for the exposures was intended to be close to that seen by some of the critical lenses in the projection assembly. Rather than the 'compaction' reported by many workers, most of the samples exhibited the opposite effect. The reduction of optical path by DUV radiation or 'rarefaction', as we have called it, is a physical phenomenon not known or published previous to our work. Dat and experimental conditions are presented which will hopefully lead to the ultimate full understanding of the rarefaction process.

Paper Details

Date Published: 5 July 2000
PDF: 15 pages
Proc. SPIE 4000, Optical Microlithography XIII, (5 July 2000); doi: 10.1117/12.389038
Show Author Affiliations
Richard G. Morton, Cymer, Inc. (United States)
Richard L. Sandstrom, Cymer, Inc. (United States)
Gerry M. Blumenstock, Cymer, Inc. (United States)
Zsolt Bor, Cymer, Inc. (United States)
Chris K. Van Peski, International SEMATECH (United States)

Published in SPIE Proceedings Vol. 4000:
Optical Microlithography XIII
Christopher J. Progler, Editor(s)

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