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Proceedings Paper

Micro-opto-electro-mechanical (MOEM) vibration sensor
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Paper Abstract

The combination of Integrated Optics with micro-mechanical structures on silicon offers immense potential for smart structure applications. One such application is sensing and mapping of vibration and vibrational modes. In the present proposal, a cantilever formed by bulk micro machining of (100). Silicon and optical waveguides formed by sol-gel process is considered. Among the various configurations possible, an optical directional coupler located close to foot of the cantilever is analyzed in detail. Analytical and simulation result using optical coupled mode theory to obtain the power transfer that is dependent on cantilever vibrations are presented.

Paper Details

Date Published: 21 June 2000
PDF: 8 pages
Proc. SPIE 3990, Smart Structures and Materials 2000: Smart Electronics and MEMS, (21 June 2000); doi: 10.1117/12.388925
Show Author Affiliations
Ananth Selvarajan, Indian Institute of Science/Bangalore (India)
Prasant Kumar Pattnaik, Indian Institute of Science/Bangalore (India)
Vishwa Murti Gupta, Indian Institute of Science/Bangalore (India)
Talabuttala Srinivas, Indian Institute of Science/Bangalore (India)

Published in SPIE Proceedings Vol. 3990:
Smart Structures and Materials 2000: Smart Electronics and MEMS
Vijay K. Varadan, Editor(s)

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