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Proceedings Paper

Optimally curved electrodes for a rotary microactuator
Author(s): Sunghwan Jung; Jong up Jeon; Y. Eugene Pak; Sukhan Lee
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Paper Abstract

The rotary electro-static micro actuators integrating optimally curved electrodes are proposed to enhance the actuating force-generation capability. The results show that the actuating force-generation capability. The results show that the actuating force generated by the prosed design is more than 5 times greater than the conventional shape for the application of hard disk drive device. Also, the results indicate that, as the smaller gap size is allowable, the force generation capability will be dramatically enhanced. In this design the uniformity in the capacitive gap size is the additional feature to be in favor of fabrication of a micro-actuator.

Paper Details

Date Published: 21 June 2000
PDF: 7 pages
Proc. SPIE 3990, Smart Structures and Materials 2000: Smart Electronics and MEMS, (21 June 2000); doi: 10.1117/12.388920
Show Author Affiliations
Sunghwan Jung, Samsung Advanced Institute of Technology (South Korea)
Jong up Jeon, Samsung Advanced Institute of Technology (South Korea)
Y. Eugene Pak, Samsung Advanced Institute of Technology (South Korea)
Sukhan Lee, Samsung Advanced Institute of Technology (South Korea)


Published in SPIE Proceedings Vol. 3990:
Smart Structures and Materials 2000: Smart Electronics and MEMS
Vijay K. Varadan, Editor(s)

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