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Proceedings Paper

Static deflection of microcantilevers in a micropump
Author(s): Sandra Esteves; Alexander M. Robinson; Abhijit Bhattacharyya
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Paper Abstract

This work is a first step in a study that will determine whether CMOS-compatible magnetically actuated micromachined cantilevers can be used as the principle actuators for fluid pumping in a microfluidic system. In this paper, we repot on the result of a finite element study on the static tip deflections of micro-cantilevers actuated by Lorentz forces. Two different micro-cantilever designs have been studied and it is found that the presence of a folded support arm in one of the configurations increases the static tip deflection three-fold. As well, the presence of a stiff silicon nitride layer on the micro-cantilever surface significantly affects the tip deflections when the layer is 0-50 percent of its original thickness; this outcome is independent of the micro-cantilever geometries studied.

Paper Details

Date Published: 21 June 2000
PDF: 9 pages
Proc. SPIE 3990, Smart Structures and Materials 2000: Smart Electronics and MEMS, (21 June 2000); doi: 10.1117/12.388919
Show Author Affiliations
Sandra Esteves, Univ. of Alberta (Canada)
Alexander M. Robinson, Univ. of Alberta (Canada)
Abhijit Bhattacharyya, Univ. of Alberta (United States)

Published in SPIE Proceedings Vol. 3990:
Smart Structures and Materials 2000: Smart Electronics and MEMS
Vijay K. Varadan, Editor(s)

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