Share Email Print
cover

Proceedings Paper

Solid state MOSFET-based hydrophone
Author(s): Bei Zhu; J. Zhang; Vijay K. Varadan; Vasundara V. Varadan
Format Member Price Non-Member Price
PDF $14.40 $18.00

Paper Abstract

In this paper, we present the design and fabrication of MEMS hydrophones on a silicon wafer using standard NMOS process technology. The effects of two MOSFET amplifiers with different W/L ratios on the hydrophone performance are investigated. A piezoelectric polymer, polyvinylidene difluoride, is employed as the sensing material. Acoustic impedance possessed by this piezoelectric material provides a reasonable match to that of water, which makes it very attractive for underwater applications. Measurements of the hydrophone devices were carried out in a pulse tube with a frequency range of 4-10 KHz. The results reveal that the hydrophone comprising a MOSFET with larger W/L ratio provides better sensitivity.

Paper Details

Date Published: 21 June 2000
PDF: 10 pages
Proc. SPIE 3990, Smart Structures and Materials 2000: Smart Electronics and MEMS, (21 June 2000); doi: 10.1117/12.388918
Show Author Affiliations
Bei Zhu, The Pennsylvania State Univ. (United States)
J. Zhang, The Pennsylvania State Univ. (United States)
Vijay K. Varadan, The Pennsylvania State Univ. (United States)
Vasundara V. Varadan, The Pennsylvania State Univ. (United States)


Published in SPIE Proceedings Vol. 3990:
Smart Structures and Materials 2000: Smart Electronics and MEMS
Vijay K. Varadan, Editor(s)

© SPIE. Terms of Use
Back to Top