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Proceedings Paper

Fabrication of an electromagnetic actuator with the planar coil
Author(s): HyunKu Jeong; OkChan Jeong; Sang Sik Yang
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Paper Abstract

This paper first presents the fabrication of an electromagnetic microactuator using an electroplated spiral copper coil on a parylene C diaphragm. The parylene is a bio-compatible material and has a very low Young's modulus less than 2.8 Gpa, which makes the large deflection for the low power consumption. The actuator consists of an electroplated coil on the parylene C diaphragm, a small-size permanent magnet and a core. The diaphragm is actuated by the Lorenz force generated by the current through the coil in the magnetic field of the magnet. The size of the actuator diaphragm is 4 by 4 mm2 and 5 micrometers thick. The resistance and inductance of the copper spiral coil are 2 (Omega) and 11 (mu) H at 100 Hz, respectively. The center deflection of the actuator diaphragm is measured with the laser vibrometer. Whenthe current through the coil is 380 mA, the peak-to-peak deflection of the actuator is 143 micrometers below the resonant frequency of 35 Hz. The mechanical sensitivity of the actuator diaphragm is 900 micrometers /A at 10 Hz and 35 Hz, respectively. An electromagnetic microactuator using the electroplated copper coil on the parylene diaphragm is expected to be useful in making a micropump for the bio-medical use.

Paper Details

Date Published: 21 June 2000
PDF: 9 pages
Proc. SPIE 3990, Smart Structures and Materials 2000: Smart Electronics and MEMS, (21 June 2000); doi: 10.1117/12.388905
Show Author Affiliations
HyunKu Jeong, Ajou Univ. (South Korea)
OkChan Jeong, Ajou Univ. (South Korea)
Sang Sik Yang, Ajou Univ. (South Korea)


Published in SPIE Proceedings Vol. 3990:
Smart Structures and Materials 2000: Smart Electronics and MEMS
Vijay K. Varadan, Editor(s)

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