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Proceedings Paper

New technique for direct integration of mechanical motion with electronics on a chip
Author(s): Pratul K. Ajmera; Xiaodong Wang; James Ross; Giri Nallapati; Harish M. Manohara
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Paper Abstract

A novel device to directly integrate mechanical motion with electronics on a chip for system integration is designed and fabricated. The device is a laterally movable gate field effect transistor. Here the gate moves parallel to the substrate surface rather than perpendicular to its as in the moving gate transistors reported earlier. Lateral motion results in linear response of device drain current with gate motion. It also makes large motion possible. The device has a variety of applications in smart sensors, actuators and integrated smart systems. A simple fabrication process is developed that is compatible with fabrication of high-aspect ratio structures. The latter give distinct performance improvement. The basic principles of operation of the LMGFET is demonstrate din initial measurements. This, to our knowledge, is the first report on the operation of such a device.

Paper Details

Date Published: 21 June 2000
PDF: 8 pages
Proc. SPIE 3990, Smart Structures and Materials 2000: Smart Electronics and MEMS, (21 June 2000); doi: 10.1117/12.388904
Show Author Affiliations
Pratul K. Ajmera, Louisiana State Univ. (United States)
Xiaodong Wang, Motorola (United States)
James Ross, Louisiana State Univ. (United States)
Giri Nallapati, Dallas Semiconductor (United States)
Harish M. Manohara, Louisiana State Univ. (United States)

Published in SPIE Proceedings Vol. 3990:
Smart Structures and Materials 2000: Smart Electronics and MEMS
Vijay K. Varadan, Editor(s)

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