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Proceedings Paper

Novel diffuser-nozzle micropump actuated by thermal bubble
Author(s): Md. Anisur Rahman; F. Ahmed; Y. Zhao; Thomas H. Gong
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Paper Abstract

A novel micro-machined valveless diffuser-nozzle micropump is presented in the present paper. The micropump is designed by thermally bubble driven actuation method. This pumping mechanism requires no mechanical moving parts for actuation and control of inlet and outlet. As a result, it requires substantially simplified fabrication process in two wafers, which is compatible with IC fabrication processes. The proposed micropump will provide high actuation stroke than existing micropumps.

Paper Details

Date Published: 21 June 2000
PDF: 14 pages
Proc. SPIE 3990, Smart Structures and Materials 2000: Smart Electronics and MEMS, (21 June 2000); doi: 10.1117/12.388900
Show Author Affiliations
Md. Anisur Rahman, Nanyang Technological Univ. (Canada)
F. Ahmed, Nanyang Technological Univ. (Singapore)
Y. Zhao, Nanyang Technological Univ. (Singapore)
Thomas H. Gong, Nanyang Technological Univ. (Singapore)


Published in SPIE Proceedings Vol. 3990:
Smart Structures and Materials 2000: Smart Electronics and MEMS
Vijay K. Varadan, Editor(s)

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