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Proceedings Paper

Thin film windows for use in a bulge tester and as a piezoelectric actuator
Author(s): Dryver R. Huston; Wolfgang Sauter; Christophe Broetz; Peter A. Sonntag; Walter J. Varhue
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Paper Abstract

This paper reports the results of experimental studies using a bulge tester and accompanying models. The bulge tester applies a load on the backside of the thin film and measures the resulting deflection. The load-deformation data can then be used to establish a mode that can be used to determine Young's modulus and the in-plane stress of the film. A variety of different films are tested under different conditions and the results are compared to theoretical values and to the result of a non-linear finite element model. The approach of the computer model is inverse to the tester. The determined values are used as input for the model and the load-deformation data is the output. The experimental results are found to be in excellent agreement with the numerical prediction. The applicability of using a thin piezoelectric film on top of another film in a window as an actuator is also investigated. The ultimate goal is to create a smart thin film window that can precisely sense and control stretching and/or deflection of the base film. This could be very useful in lithography procedures in order to align and control the mask or particular potions of the mask.

Paper Details

Date Published: 21 June 2000
PDF: 12 pages
Proc. SPIE 3990, Smart Structures and Materials 2000: Smart Electronics and MEMS, (21 June 2000); doi: 10.1117/12.388899
Show Author Affiliations
Dryver R. Huston, Univ. of Vermont (United States)
Wolfgang Sauter, Univ. of Vermont (United States)
Christophe Broetz, Univ. of Vermont (United States)
Peter A. Sonntag, Univ. of Vermont (United States)
Walter J. Varhue, Univ. of Vermont (United States)


Published in SPIE Proceedings Vol. 3990:
Smart Structures and Materials 2000: Smart Electronics and MEMS
Vijay K. Varadan, Editor(s)

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