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Proceedings Paper

MEMS sensing and control: an aerospace perspective
Author(s): Jeffrey N. Schoess; David K. Arch; Wei Yang; Cleopatra Cabuz; Ben Hocker; Burgess R. Johnson; Mark L. Wilson
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Paper Abstract

Future advanced fixed- and rotary-wing aircraft, launch vehicles, and spacecraft will incorporate smart microsensors to monitor flight integrity and provide flight control inputs. This paper provides an overview of Honeywell's MEMS technologies for aerospace applications of sensing and control. A unique second-generation polysilicon resonant microbeam sensor design is described. It incorporates a micron-level vacuum-encapsulated microbeam to optically sense aerodynamic parameters and to optically excite the sensor pick off: optically excited self-resonant microbeams form the basis for a new class of versatile, high- performance, low-cost MEMS sensors that uniquely combine silicon microfabrication technology with optoelectronic technology that can sense dynamic pressure, acceleration forces, acoustic emission, and many other aerospace parameters of interest. Honeywell's recent work in MEMS tuning fork gyros for inertial sensing and a MEMS free- piston engine are also described.

Paper Details

Date Published: 21 June 2000
PDF: 6 pages
Proc. SPIE 3990, Smart Structures and Materials 2000: Smart Electronics and MEMS, (21 June 2000); doi: 10.1117/12.388895
Show Author Affiliations
Jeffrey N. Schoess, Honeywell Technology Ctr. (United States)
David K. Arch, Honeywell Technology Ctr. (United States)
Wei Yang, Honeywell Technology Ctr. (United States)
Cleopatra Cabuz, Honeywell Technology Ctr. (United States)
Ben Hocker, Honeywell Technology Ctr. (United States)
Burgess R. Johnson, Honeywell Technology Ctr. (United States)
Mark L. Wilson, Honeywell Technology Ctr. (United States)

Published in SPIE Proceedings Vol. 3990:
Smart Structures and Materials 2000: Smart Electronics and MEMS
Vijay K. Varadan, Editor(s)

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