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Proceedings Paper

Large-area multiplexed sensing using MEMS and fiber optics
Author(s): Michael B. Miller; Richard L. Clark Jr.; Clifton R. Bell; Patrick M. Russler
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Paper Abstract

Micro-electro-mechanical (MEMS) technology offers the ability to implement local and independent sensing and actuation functions through the coordinated response of discrete micro-electro-mechanical 'basis function' elements. The small size of micromechanical components coupled with the ability to reduce costs using volume manufacturing techniques opens up significant potential not only in military applications such as flight and engine monitoring and control, but in autonomous vehicle control, smart munitions, airborne reconnaissance, LADAR, missile guidance, and even in intelligent transportation systems and automotive guidance applications. In this program, Luna Innovations is developing a flexible, programmable interface which can be integrated direction with different types of MEMS sensors, and then used to multiplex many sensors ona single optical fiber to provide a unique combination of functions that will allow larger quantities of sensory input with better resolution than ever before possible.

Paper Details

Date Published: 21 June 2000
PDF: 9 pages
Proc. SPIE 3990, Smart Structures and Materials 2000: Smart Electronics and MEMS, (21 June 2000); doi: 10.1117/12.388887
Show Author Affiliations
Michael B. Miller, Luna Innovations, Inc. (United States)
Richard L. Clark Jr., College of the Canyons (United States)
Clifton R. Bell, Luna Innovations, Inc. (United States)
Patrick M. Russler, Luna Innovations, Inc. (United States)


Published in SPIE Proceedings Vol. 3990:
Smart Structures and Materials 2000: Smart Electronics and MEMS
Vijay K. Varadan, Editor(s)

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