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Proceedings Paper

Pulsed laser deposition of phosphor nitride thin films
Author(s): Bohdan K. Kotlyarchuk; Dmytro I. Popovych
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Paper Abstract

In this paper we report on the results of experimental investigations of processes of pulse laser reactive deposition and structure formation and characteristics of AlN, AlN:Mn, GaN, GaN:Zn, GaN:Mn, GaN:Cr, MgSiN2:Ti, SrSiN2:Eu thin films which have been condensed from laser erosion plasma into reactive atmosphere (nitrogen).

Paper Details

Date Published: 14 June 2000
PDF: 5 pages
Proc. SPIE 4148, Optoelectronic and Hybrid Optical/Digital Systems for Image and Signal Processing, (14 June 2000); doi: 10.1117/12.388454
Show Author Affiliations
Bohdan K. Kotlyarchuk, Institute for Applied Problems of Mechanics and Mathematics (Ukraine)
Dmytro I. Popovych, Institute for Applied Problems of Mechanics and Mathematics (Ukraine)


Published in SPIE Proceedings Vol. 4148:
Optoelectronic and Hybrid Optical/Digital Systems for Image and Signal Processing
Simon B. Gurevich; Zinovii T. Nazarchuk; Leonid I. Muravsky, Editor(s)

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