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Proceedings Paper

Fabrication of electroactive polymer actuator composed of polypyrrole and solid-polymer electrolyte and its application to micropump
Author(s): Seung-Ki Lee; Young Choi; WooYoung Sim; Sang Sik Yang; HoJung An; James Jungho Pak
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Paper Abstract

Mechanical performances of beam-shaped and bridge-shaped conductive polymer actuator in aqueous solution and in solid electrolyte have been measured and analyzed varying polymerization conditions and operating conditions. The optimum thickness of polypyrrole for the best bending performance is about 17-19 μm which has been polymerized at the current density of 5.4 μA/mm2 for 120 minutes. For the application of conductive polymer actuator to micropump, silicon bulk micromachining process has been combined with polymer processes. By use of parylene diaphragm and anisotropic etching of silicon, the micropump structure composed of polypyrrole and solid polymer electrolyte has been fabricated successfully.

Paper Details

Date Published: 7 June 2000
PDF: 9 pages
Proc. SPIE 3987, Smart Structures and Materials 2000: Electroactive Polymer Actuators and Devices (EAPAD), (7 June 2000); doi: 10.1117/12.387787
Show Author Affiliations
Seung-Ki Lee, Dankook Univ. (South Korea)
Young Choi, Dankook Univ. (South Korea)
WooYoung Sim, Ajou Univ. (South Korea)
Sang Sik Yang, Ajou Univ. (South Korea)
HoJung An, Korea Univ. (North Korea)
James Jungho Pak, Korea Univ. (South Korea)


Published in SPIE Proceedings Vol. 3987:
Smart Structures and Materials 2000: Electroactive Polymer Actuators and Devices (EAPAD)
Yoseph Bar-Cohen, Editor(s)

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