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Proceedings Paper

Pulsed-laser deposition of hydrogenated amorphous carbon films from a polymeric target
Author(s): Sumei Huang; Yongfeng Lu; Zhuo Sun
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Paper Abstract

The phenylcarbyne polymer possesses a diamond-like structure. Because of its special structure, this polymer can be converted into diamond-like carbon phases at atmospheric pressure by thennal decomposition. In this article, we report on the growth of hydrogenated amoiphous carbon films (a-C:H) films by pulsed laser (KrF excimer, λ =248 mn) ablation of a phenylcarbyne polymer target under vacuum. a-C:H films were deposited with various laser fluences and at different substrate temperatures. Chemical and siructural characteristics of these films were analysed using X-ray-excited Auger electron spectroscopy (XAES), photoelectron loss spectroscopy (PELS), and Ranian speciroscopy. It was found that the fourfold-coordinated component increases with laser fluence at 80°C or increases with temperature increasing from 25°C to 60°C at a fluence of 1 x 1O9cm2. When the deposition temperature is increased from 60°C to 200°C at a fluence of 1 x 109 W/cm2, the graphitic component increases. The variation in chemical structures of these films is explained in terms of the changes in the fraction of sp2-bonded clusters and changes in the termination of the gmphitic clusters and sp3-bonded networks by hydrogen in the a-C:H films.

Paper Details

Date Published: 7 June 2000
PDF: 9 pages
Proc. SPIE 3933, Laser Applications in Microelectronic and Optoelectronic Manufacturing V, (7 June 2000); doi: 10.1117/12.387587
Show Author Affiliations
Sumei Huang, National Univ. of Singapore (Singapore)
Yongfeng Lu, National Univ. of Singapore (United States)
Zhuo Sun, Nanyang Technological Univ. (Singapore)

Published in SPIE Proceedings Vol. 3933:
Laser Applications in Microelectronic and Optoelectronic Manufacturing V
Henry Helvajian; Koji Sugioka; Malcolm C. Gower; Jan J. Dubowski, Editor(s)

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