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Proceedings Paper

Reprography method of nondestructive testing of micro-cracks inside the wall of a pinhole micromanufactured by laser
Author(s): Chenbo Zhou; Wenying Yu; Jinzuo Sun; Hengfu Chen
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Paper Abstract

A new method of reprography and detection employing scan electron microscope (SEM) for the non-destructive testing the micro-cracks with width about 1 μm on the inner surface of the pinhole has been presented in this paper. The results show that the new method is a feasible approach to test the micro-cracks of the inner surface of the pinhole with sub-millimeter aperture.

Paper Details

Date Published: 7 June 2000
PDF: 7 pages
Proc. SPIE 3933, Laser Applications in Microelectronic and Optoelectronic Manufacturing V, (7 June 2000); doi: 10.1117/12.387582
Show Author Affiliations
Chenbo Zhou, Yantai Univ. (China)
Wenying Yu, Yantai Univ. (China)
Jinzuo Sun, Yantai Univ. (China)
Hengfu Chen, Xi'an Medical Univ. (China)


Published in SPIE Proceedings Vol. 3933:
Laser Applications in Microelectronic and Optoelectronic Manufacturing V
Henry Helvajian; Koji Sugioka; Malcolm C. Gower; Jan J. Dubowski, Editor(s)

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