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Proceedings Paper

Custom specific fabrication of integrated optical devices by excimer laser ablation of polymers
Author(s): Thomas Klotzbuecher; Martin Popp; Torsten Braune; Jens Haase; Anne Gaudron; Ingo Smaglinski; Thomas Paatzsch; Hans-Dieter Bauer; Wolfgang Ehrfeld
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Paper Abstract

Excimer laser ablation was used for direct writing of multimode waveguide structures with passive fiber alignment grooves in polymers. First, integrated optical multimode components were simulated by the method of beam propagation to optimize the optical performance of the design. Then the CNC codes for laser machining were created directly from the corresponding CAD data. ArF Excimer laser radiation of wavelength (lambda) equals 193 nm was used for ablation of adjacent grooves with a cross sectional area of 50 X 50 micrometers 2 and lengths in the order of several mm. The laser-written grooves were filled with a liquid pre-polymer which after UV-curing served as the waveguiding structures. The smoothest surfaces during laser ablation were achieved by applying several ablation scans with reduced material removal rates but higher feedrates. Debris formation, also influencing the surface roughness, was suppressed or minimized by making use of capable polymers. With the method of laser ablation linear waveguides of length 1 equals 10 mm with insertion losses Li in the rang of 1.3 to 1.9 dB have been realized for (lambda) equals 1310 nm, depending on the polymer used. By means of 1 X 2-splitters, 4 X 4 as well as 4 X 16 starcouplers it was shown that laser ablation is a well suited tool for rapid prototyping of integrated optical multimode elements.

Paper Details

Date Published: 7 June 2000
PDF: 9 pages
Proc. SPIE 3933, Laser Applications in Microelectronic and Optoelectronic Manufacturing V, (7 June 2000); doi: 10.1117/12.387565
Show Author Affiliations
Thomas Klotzbuecher, Institut fuer Mikrotechnik Mainz GmbH (Germany)
Martin Popp, Institut fuer Mikrotechnik Mainz GmbH (Germany)
Torsten Braune, Institut fuer Mikrotechnik Mainz GmbH (Germany)
Jens Haase, Institut fuer Mikrotechnik Mainz GmbH (Denmark)
Anne Gaudron, Institut fuer Mikrotechnik Mainz GmbH (Germany)
Ingo Smaglinski, Institut fuer Mikrotechnik Mainz GmbH (Germany)
Thomas Paatzsch, Institut fuer Mikrotechnik Mainz GmbH (Germany)
Hans-Dieter Bauer, Institut fuer Mikrotechnik Mainz GmbH (Germany)
Wolfgang Ehrfeld, Institut fuer Mikrotechnik Mainz GmbH (Germany)


Published in SPIE Proceedings Vol. 3933:
Laser Applications in Microelectronic and Optoelectronic Manufacturing V
Henry Helvajian; Koji Sugioka; Malcolm C. Gower; Jan J. Dubowski, Editor(s)

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