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Proceedings Paper

Laser micromachining: new developments and applications
Author(s): Nadeem Hasan Rizvi; David K. Milne; Phil T. Rumsby; Malcolm C. Gower
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Paper Abstract

Excimer laser micromachining has developed into a mature production method and many industrial applications such as the drilling of ink-jet printer nozzles, production environments. The important concepts of excimer laser micromachining systems are described and the novel methods which have been developed in this area are presented. In particular, techniques for the production of complex, multi- level 3D microstructures are described and examples of such features are used to illustrate the relevant applications. Furthermore, some initial micromachining result from a sub- nanosecond, solid-state fiber laser are presented to highlight the rapidly-growing area of laser micro processing using ultra-short pulse lasers.

Paper Details

Date Published: 7 June 2000
PDF: 11 pages
Proc. SPIE 3933, Laser Applications in Microelectronic and Optoelectronic Manufacturing V, (7 June 2000); doi: 10.1117/12.387562
Show Author Affiliations
Nadeem Hasan Rizvi, Exitech Ltd. (United Kingdom)
David K. Milne, Exitech Ltd. (United Kingdom)
Phil T. Rumsby, Exitech Ltd. (United Kingdom)
Malcolm C. Gower, Exitech Ltd. (United Kingdom)

Published in SPIE Proceedings Vol. 3933:
Laser Applications in Microelectronic and Optoelectronic Manufacturing V
Henry Helvajian; Koji Sugioka; Malcolm C. Gower; Jan J. Dubowski, Editor(s)

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